| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a room pressure control system that restores smoothly the room pressure of a clean room to atmospheric pressure in a short time. <P>SOLUTION: The room pressure control system 10A, in interrupting room pressure control of the clean room 12, compares upper and lower limit room pressures with a measured room pressure of the clean room 12. The room pressure control system 10A performs close operation for gradually reducing the damper opening degrees of opened first and second dampers 17, 18 to be fully closed when the measured room pressure is within the range of the upper and lower limit room pressures, stops temporarily the close operation of the second damper 18 while closing the first damper 17 when the measured room pressure exceeds the upper limit room pressure, and stops temporarily the close operation of the first damper 17 while closing the second damper 18 when the measured room pressure is below the lower limit room pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
