| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a load port which can prevent sudden interference with an FOUP or a wafer due to inaccurate horizontal balance in installation when the wafer is put in and out of the FOUP. <P>SOLUTION: A load port 1 has a mapping device M configured by a lifting part 6 which is movable in the height direction and a retreat part 7 connected to the lifting part 6 to have a sensor part 8 in the tip. The retreat part 7 is movable between a mapping position (P2) where the sensor part 8 is put into an FOUPx to be able to detect a wafer W and a retreat position (P1) where the tip is retreated to the outside of the FOUPx, while the retreat part 7 is also movable to a placement position (P3) where the tip is put farther into the FOUPx than the mapping position (P2) to be able to place the wafer W. The load port 1 also has a transport device H to transfer the wafer W between the inside of the FOUPx and the inside of a wafer transfer room B by using the retreat part 7 and the lifting part 6. <P>COPYRIGHT: (C)2012,JPO&INPIT |
