| 摘要 |
PURPOSE:To improve the characteristics of a solar battery by continuously supplying a purging gas to each buffer changer which is provided between independent reaction chambers, thereby preventing the gas between the chambers from moving upon movement of a flexible film. CONSTITUTION:Reaction chambers 15a-15c for forming by a plasma reaction an n type layer, an i type layer and a p type layer are sequentially provided. The movement of the gas upon movement of a flexible substrate 1 is controlled by the gas which is made of at least one of silane gas, disilane gas, hydrogen gas, argon gas, helium gas, nitrogen gas and ammonia gas which are introduced into the respective chambers 27a-27d between a feeding chamber 13 and the first reaction chamber 15a, between the first chamber 15a and the second reaction chamber 15b, between the second chamber 15b and the third reaction chamber 15c, and between the third chamber 15c and a winding chamber 18, thereby maintaining the purity of gas for producing in the chambers 15a-15c. |
