PROCESSING LIQUID DISCHARGE DEVICE, CLEANING UNIT AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To efficiently remove fine liquid crystals remaining on the nozzle surface of a head.

SOLUTION: A processing liquid discharge device includes one or a plurality of injection nozzles which inject gas to the fine liquid crystals remaining on the nozzle surface of the head and push the liquid crystals toward a suction nozzle so as to efficiently remove the remaining liquid crystals by means of a head cleaning unit for cleaning the nozzle surface of the head. The processing liquid discharge device further includes: a horizontal drive member for adjusting an interval between the injection nozzle and the suction nozzle; a lifting member for adjusting the level of a discharge port of the injection nozzle; and a pressure adjusting means for adjusting the injection pressure at the discharge port of the injection nozzle.

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