| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter which reduces a warp generated on a substrate and improves its resolution, an optical module, and an optical analyzer. <P>SOLUTION: An etalon 5 comprises a fixed mirror 56 provided on a first substrate 51; a moving mirror 57 provided on a second substrate 52, and opposing to the fixed mirror 56 through a gap G; a first electrode 541 provided on a surface opposing to the second substrate 52 of the first substrate 51; a second electrode 542 provided on a first surface 52A opposing to the first substrate 51 of the second substrate 52, and provided separately from the first electrode 541; and a warp preventive film 53 covering at least the moving mirror 57 on a second surface 52B of the second substrate in a plane view. A direction of internal stress acting in a surface direction of the warp preventive film 53 and a direction of inner stress acting in a surface direction of the moving mirror 57 and the second electrode 542 are same. <P>COPYRIGHT: (C)2012,JPO&INPIT |
