| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a physical quantity sensor device for suppressing an inclination of a sensor part in removal of a mending tool, and for suppressing occurrence of product failure. <P>SOLUTION: A method of manufacturing a physical quantity sensor device includes: a connection process of inserting a mending tool 80 whose fixing force as a force to fix a sensor part 20 is variable from the opposite side of the loading side of the sensor part 20 in a concave part 11 via a through-hole 12 into the inside of the concave part 11, and bringing the mending tool 80 into contact with the sensor part 20 to fix the sensor part 20 to the mending tool 80, and performing wire bonding in a state that the sensor part 20 is fixed to the mending tool 80 to electrically connect the sensor part 20 via a bonding wire 50 to a connection terminal 40; and a removal process of removing the mending tool 80 from a package 10 after weakening the fixing force of the mending tool 80 more than that in the connection process. <P>COPYRIGHT: (C)2012,JPO&INPIT |
