| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve determination accuracy when determining the occurrence of discharge when supplying an inspection signal to an object to be inspected. <P>SOLUTION: The inspection device includes: a plurality of detecting parts (first detecting part 3a, second detecting part 3b, third detecting part 3c, and fourth detecting part 3d) for detecting physical quantity (voltage or current) generated when a voltage signal Ve is supplied to a conductor pattern 101 of a circuit board 100; and a control part 4 for determining the presence or absence of discharge resulting from the supply of the voltage signal Ve based on the detection results obtained by the detecting parts. Detecting parts are configured to differ from one another in a detection frequency band relative to the corresponding physical quantity. When at least one of the physical quantities detected by the corresponding detecting parts satisfies a predetermined condition, the control part 4 determines that discharge has occurred. <P>COPYRIGHT: (C)2012,JPO&INPIT |
