NITROGEN OXIDE GAS SENSOR

摘要

The present invention provides a nitrogen oxide gas sensor which can adjust sensing temperature without deteriorating the sensing accuracy when simultaneously measuring nitrogen monoxide and nitrogen dioxide. To this end, the invention provides a nitrogen oxide gas sensor comprising: a solid oxygen ion conducting electrolyte; a first film which adjoins said solid electrolyte, and is formed as a metal oxide; a second film which adjoins said solid electrolyte, and is formed as a metal oxide; a power source having a first node which is electrically connected with said first film and a second node which is electrically connected with said second film, and applying currents to said first film and the second film; a measurement unit which measures a potential difference between said first node and second node; a heater which is buried in said solid electrolyte, having a first part and a second part, and is formed as a resistor, wherein said first part and second part have widths that are separated as much as the area corresponding to at least one of said first and second films; and an insulator film which is interposed between said heater and said solid electrolyte, and having openings corresponding to the separated widths of the first part and the second part of said heater thereof.