发明名称 |
TRANSFERRING SYSTEM AND TRANSFERRING METHOD |
摘要 |
Disclosed is a transferring system (1) for transferring a fine transfer pattern (M1) formed in a mold (M) to a molding material (D) provided on a substrate (W), the transferring system including: a positioning device (3) that is configured so as to position the substrate (W) with respect to the mold (M) and to join the mold (M) and the substrate (W) together after said positioning; and a transferring device (5) that is provided separately from the positioning device (3) and that is configured so as to receive the mold (M) and the substrate (W), which have been positioned and joined together by the positioning device (3), and to perform transferring by pressing the mold (M) and the substrate (W) and curing the molding material (D). |
申请公布号 |
WO2012029843(A1) |
申请公布日期 |
2012.03.08 |
申请号 |
WO2011JP69752 |
申请日期 |
2011.08.31 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY;TOSHIBA KIKAI KABUSHIKI KAISHA;SHIMODA, TATSUYA;KOKUBO, MITSUNORI;SUGIURA, YUKI |
发明人 |
SHIMODA, TATSUYA;KOKUBO, MITSUNORI;SUGIURA, YUKI |
分类号 |
B29C59/02;G11B5/84;G11B7/26;H01L21/027 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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