| 摘要 |
PURPOSE: A substrate processing apparatus is provided to simply revise a height deviation between transport rollers by including a level control element capable of controlling and setting a height. CONSTITUTION: A frame(2) is used for a worktable for transferring and processing a substrate(G). A transport roller(4) is located at an upper part of the frame. A roller supporting part(6) supports the transport roller around an axis line to be rotatable. A bearing(B) is inserted into both side end parts of a rotary shaft(S). A support plate(P) is arranged on the frame in order to be corresponded to the both side end parts of the rotary shaft. |
