SUBSTRATE TREATMENT APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to improve tilting precision in the tilting transfer of a substrate by including a position correction element to revise a positional deviation before or after the tilting of the substrate. CONSTITUTION: A frame(2) is used for a worktable for transferring and processing a substrate(G). A transport unit(4) transfers the substrate from one side to the other side of the frame. The transport unit is composed of several transport rollers(R). A bearing block(R2) is arranged in a state fixed on a separate support stand(R3) at an upper part of the frame. A tilting unit(6) tilts the transport rollers of the transport unit to either one side or the other side.