发明名称 INSPECTION EQUIPMENT AND INSPECTION METHOD
摘要 Foreign metal inspection equipment is provided with: a conveying device for conveying a sample to be subjected to inspection; electrodes positioned so as to face the surface of the sample; a measurement device for measuring the capacitance between the electrodes and the sample being conveyed by the conveying device; and a processing unit that inspects for foreign metal mixed in the sample on the basis of the change in capacitance measured by the measurement device.
申请公布号 WO2012029223(A1) 申请公布日期 2012.03.08
申请号 WO2011JP03458 申请日期 2011.06.17
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION;MAKUUCHI, MASAMI;NOGUCHI, MINORI;KAWAGUCHI, HIROSHI 发明人 MAKUUCHI, MASAMI;NOGUCHI, MINORI;KAWAGUCHI, HIROSHI
分类号 G01N27/24 主分类号 G01N27/24
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