发明名称 |
UNIFORMITY CONTROL USING ION BEAM BLOCKERS |
摘要 |
An ion beam is generated and the energy of this ion beam is changed from a first energy to a second energy through, for example, acceleration or deceleration. A portion of the ion beam is blocked after the energy is changed and the ion beam is implanted into a workpiece. A plurality of blockers may be used to block the beam. Each blocker may be attached to a drive unit configured to translate one of the blockers in a first direction. |
申请公布号 |
US2012056107(A1) |
申请公布日期 |
2012.03.08 |
申请号 |
US20100877715 |
申请日期 |
2010.09.08 |
申请人 |
DISTASO DANIEL;OLSON JOSEPH C.;SINCLAIR FRANK;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
DISTASO DANIEL;OLSON JOSEPH C.;SINCLAIR FRANK |
分类号 |
G21G1/00;G21G5/00 |
主分类号 |
G21G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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