发明名称 |
POWER SUPPLY APPARATUS FOR GENERATION OF ATMOSPHERIC PLASMA IN ORDER TO OPTIMIZE LOAD MATCHING |
摘要 |
PURPOSE: A power supply apparatus for generating atmospheric plasma to optimize load matching and a controlling method thereof are provided to optimize load matching between plasma capacitive loads by dynamically controlling a pulse length of an output voltage. CONSTITUTION: A rectifier(1) changes an AC voltage from a commercial AC power source into a DC voltage. An inverter unit(2) modulates the DC voltage transformed through the rectifier into the AC voltage of a pulse shape. A pulse boosting part(4) can be formed as a kind of a transformer. A capacitive load(5) is composed of two electrodes receiving an output voltage. A current detection inductor(3) detects a current which receives from the pulse boosting part. A controlling part(6) generates a gate drive signal for controlling a pulse length of an output voltage. A gate driving part(7) applies an amplified signal of the gate drive signal to an inverter part. |
申请公布号 |
KR20120020268(A) |
申请公布日期 |
2012.03.08 |
申请号 |
KR20100083780 |
申请日期 |
2010.08.30 |
申请人 |
EESYS CO., LTD. |
发明人 |
CHO, JUN SEOK;KIM, HAN GOO;CHAE, YOUNG MIN |
分类号 |
H05H1/46;H01L21/205 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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