发明名称 APPARATUS FOR ELECTROMAGNETIC CASTING OF SILICON INGOT
摘要 PURPOSE: An electromagnetic casting apparatus for a silicon ingot is provided to control the impurity contamination of molten silicon by preventing an ambient gas, rising at a gap with an inner circumference and outer circumference of an after heater, from arriving to a bottom part of a cold crucible. CONSTITUTION: A cold crucible(7) is arranged in a chamber(1). The cold crucible has conductivity. A silicon material(11) is loaded on the cold crucible. The silicon material is melted by electronic induction heating from an induction coil(8). A silicon ingot(3) is cast while pulling down molten silicon from the cold crucible and solidifying.
申请公布号 KR20120021134(A) 申请公布日期 2012.03.08
申请号 KR20100126879 申请日期 2010.12.13
申请人 SUMCO CORPORATION 发明人 KUSABA TATSUMI
分类号 C30B29/06;C01B33/021;C30B11/00;H01L21/02 主分类号 C30B29/06
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