摘要 |
PURPOSE: An electromagnetic casting apparatus for a silicon ingot is provided to control the impurity contamination of molten silicon by preventing an ambient gas, rising at a gap with an inner circumference and outer circumference of an after heater, from arriving to a bottom part of a cold crucible. CONSTITUTION: A cold crucible(7) is arranged in a chamber(1). The cold crucible has conductivity. A silicon material(11) is loaded on the cold crucible. The silicon material is melted by electronic induction heating from an induction coil(8). A silicon ingot(3) is cast while pulling down molten silicon from the cold crucible and solidifying.
|