ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable electrical component.

SOLUTION: The electrical component includes: a substrate 100; a functional element 120 formed on the substrate; a first layer 109 forming a cavity 130 for accommodating the functional element on the substrate and including a plurality of through holes 109c; and a second layer 110 formed on the first layer and seals the plurality of through holes. The first layer includes: a first film 109a formed on the lower side; and a second film 109b which is formed on the first film and has a lower coefficient of thermal expansion than that of the first film.

COPYRIGHT: (C)2012,JPO&INPIT