METHOD OF MANUFACTURING LIQUID EJECTION HEAD, LIQUID EJECTION HEAD, AND LIQUID EJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To properly supply a liquid to a storage chamber from a flow passage.

SOLUTION: A method of manufacturing a liquid ejection head includes: a step of forming a step on a substrate so that a first surface is lower than a second surface; a step of forming a positive acting resist that solves by exposure on the first and second surfaces on the substrate on which the step is formed; a step of exposing the positive acting resist so that a distance from a second surface to a top surface of the positive acting resist after dissolution of the first surface becomes the same as that from the second surface to a top surface of the positive acting resist after dissolution of the second surface; a step of forming the positive acting resist on a solid layer by development after the exposure; a step of forming a coating layer for coating the solid layer; and a step of forming the storage chamber that stores the liquid ejected from an ejection opening by eliminating the solid layer after formation of the coating layer between the first surface and the coating layer, and forming the flow passage into which the liquid flows into the storage chamber between the second surface and the coating layer.

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