发明名称 |
METHOD FOR PREPARING A THIN FILM OF THIOSPINELS |
摘要 |
The invention relates to a method for preparing a thin film of at least one compound of formula AM4X8, where: A is Ga or Ge; M is V, Nb, Ta or Mo; and X is S or Se. Said method includes the following steps: i) a step of forming a thin film of at least one compound of formula AM4X8 by the magnetron spraying of a target including at least one compound of said formula AM4X8, in an atmosphere including at least one inert gas; and ii) a step of annealing the thin film formed during step i) by heat treating; wherein step i) and/or step ii) are carried out in the presence of sulphur when X is S or in the presence of selenium when X is Se. |
申请公布号 |
US2012058283(A1) |
申请公布日期 |
2012.03.08 |
申请号 |
US201013254727 |
申请日期 |
2010.03.17 |
申请人 |
BESLAND MARIE-PAULE;SOUCHIER EMELINE;CARIO LAURENT;CORRAZE BENOIT;JANOD ETIENNE;MARTIAL JULIE |
发明人 |
BESLAND MARIE-PAULE;SOUCHIER EMELINE;CARIO LAURENT;CORRAZE BENOIT;JANOD ETIENNE;MARTIAL JULIE |
分类号 |
C23C14/06;C23C14/34;C23C14/58 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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