发明名称 METHOD FOR PREPARING A THIN FILM OF THIOSPINELS
摘要 The invention relates to a method for preparing a thin film of at least one compound of formula AM4X8, where: A is Ga or Ge; M is V, Nb, Ta or Mo; and X is S or Se. Said method includes the following steps: i) a step of forming a thin film of at least one compound of formula AM4X8 by the magnetron spraying of a target including at least one compound of said formula AM4X8, in an atmosphere including at least one inert gas; and ii) a step of annealing the thin film formed during step i) by heat treating; wherein step i) and/or step ii) are carried out in the presence of sulphur when X is S or in the presence of selenium when X is Se.
申请公布号 US2012058283(A1) 申请公布日期 2012.03.08
申请号 US201013254727 申请日期 2010.03.17
申请人 BESLAND MARIE-PAULE;SOUCHIER EMELINE;CARIO LAURENT;CORRAZE BENOIT;JANOD ETIENNE;MARTIAL JULIE 发明人 BESLAND MARIE-PAULE;SOUCHIER EMELINE;CARIO LAURENT;CORRAZE BENOIT;JANOD ETIENNE;MARTIAL JULIE
分类号 C23C14/06;C23C14/34;C23C14/58 主分类号 C23C14/06
代理机构 代理人
主权项
地址