发明名称 A PELLICLE CONTAINER KIT
摘要 PURPOSE: A pellicle container kit is provided to prevent rubbing between a corner clip and a container case by manufacturing the corner clip by using resin having durometer hardness of D58 to D64. CONSTITUTION: A tray(2) and a cover(3) form a pellicle container having a corner in the bond. A coner clip(5) is fitted to the corner of the pellicle container. The corner clip is manufactured by a material between urethane resin and polyethylene resin. The durometer hardness of the corner clip is D58 to D64. The corner clip is manufactured by using the polyethylene resin having the density of 0.94 g/cm^3 to 0.95 g/cm^3.
申请公布号 KR20120021185(A) 申请公布日期 2012.03.08
申请号 KR20110071506 申请日期 2011.07.19
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 NOZAKI SATOSHI
分类号 H01L21/673 主分类号 H01L21/673
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