| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus and coating method which achieve a desired coating thickness when starting to apply coating by facilitating structure. <P>SOLUTION: The coating apparatus which includes a coating liquid supply tank 16 for storing coating liquid, a die 10 for ejecting the coating liquid supplied from the coating liquid supply tank 16, and a coating liquid recovery mechanism 24 for recovering the coating liquid from the die 10 when coating is completed is characterized in that the coating liquid recovery mechanism 24 stores the recovered coating liquid to eject and supply the coating liquid to the die 10 while starting to apply coating. <P>COPYRIGHT: (C)2012,JPO&INPIT |
