发明名称 PHASE CHANGE MEMORY STRUCTURES AND METHODS
摘要 Methods, devices, and systems associated with phase change material memory are described herein. In one or more embodiments, a method of forming a phase change material memory cell includes forming a number of memory structure regions, wherein the memory structure regions include a bottom electrode material and a sacrificial material, forming a number of insulator regions between the number of memory structure regions, forming a number of openings between the number of insulator regions and forming a contoured surface on the number of insulator regions by removing the sacrificial material and a portion of the number of insulator regions, forming a number of dielectric spacers on the number of insulator regions, forming a contoured opening between the number of insulator regions and exposing the bottom electrode material by removing a portion of the number of dielectric spacers, and forming a phase change material in the opening between the number of insulator regions.
申请公布号 WO2012030379(A2) 申请公布日期 2012.03.08
申请号 WO2011US01483 申请日期 2011.08.24
申请人 MICRON TECHNOLOGY, INC.;TANG, SANH, D. 发明人 TANG, SANH, D.
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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