| 摘要 |
One or more embodiments relate to a capacitor, comprising: a first electrode comprising a first layer including tantalum nitride, and a second layer including alpha-tantalum overlying the first layer; a dielectric layer; and a second electrode overlying the dielectric layer, the second electrode comprising a first layer including tantalum nitride, and a second layer including alpha-tantalum overlying the first layer. |
