| 摘要 |
PURPOSE: A load port device is provided to have high rigidity while reducing weight by arranging a plurality of connection shafts between main bases. CONSTITUTION: A main base(13) is arranged on an installation plane of a semiconductor-treating apparatus while maintaining a predetermined angle. A connecting plate(11) is fixed to the installation plane in order to connect the main base and the installation plane. A loading table(15) comprises a pod and is supported by the main base. A door(17) makes maintain a cover of the pod. A door driving tool(19) is supported by the main base and supports the door.
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