| 摘要 |
PURPOSE: A susceptor and a substrate processing device including the same are provided to stably supply power to a heating element or an RF electrode pate by preventing corrosion of a power connector which is connected to the heating element or RF electrode plate of a substrate support plate. CONSTITUTION: A shaft(220) supports a substrate support plate(210). A heating element(212) heats a substrate(S) on the upper side of a substrate support plate. A power pipe(221) provides power to the heating element via the shaft. A shaft vacuum processing unit(240) vacuumizes the inner space of the shaft. A bellows(230) is installed in an outer wall of the shaft to prevent sealing breakdown.
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