APPARATUS AND METHOD FOR MANUFACTURING SILICON SUBSTRATE, AND SILICON SUBSTRATE

摘要

In a fabrication zone where a silicon ribbon 12 is manufactured from molten silicon under an inactive gaseous atmosphere, a fabrication belt conveyer (fabrication bed) 5 composed of a feeding substrate 11 is arranged. The substrate is supplied with molten silicon 2 from a crucible furnace through a rotating roller 3 which adjusts the molten silicon into a state suitable for fabrication. The substrate 11 is provided with a plurality of gas ejecting pores and gas evacuating pores for ejecting and evacuating a gas with respect to a silicon ribbon 4 being fabricated from the molten silicon 2 from below the silicon ribbon. While stably maintaining the fabricated silicon ribbon 4 on the gas by the dynamic pressure balanced state of the gas being ejected and the gas being evacuated, and while forming a coating on a silicon surface by a reactive material and the like contained in the gas, tensile stress is applied in direction parallel to the surface of the fabricated silicon ribbon 4 and a silicon ribbon 12 is fabricated.