发明名称 UNIT FOR SUPPLYING A SUBSTRATE
摘要 <p>PURPOSE: A substrate supplying unit is provided to prevent a substrate from being overheated by controlling a temperature of a heater using a temperature sensor. CONSTITUTION: A magazine inputting unit(100) supports a magazine(20) with a substrate(10) and includes a stage(110) and a first driving unit(120). A substrate transferring unit(200) transfers the substrate from the magazine to a substrate support unit(300). The substrate transferring unit includes a lower roller(210) and an upper roller(220). The substrate support unit supports the substrate transferred from the substrate transferring unit.</p>
申请公布号 KR20120018835(A) 申请公布日期 2012.03.06
申请号 KR20100081724 申请日期 2010.08.24
申请人 SECRON CO., LTD. 发明人 CHOI, JIN JOO;CHOI, IL RAK;KIM, DU HWAN
分类号 H01L21/677;B65G49/07;H01L21/56;H01L23/28 主分类号 H01L21/677
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