发明名称 |
UNIT FOR SUPPLYING A SUBSTRATE |
摘要 |
<p>PURPOSE: A substrate supplying unit is provided to prevent a substrate from being overheated by controlling a temperature of a heater using a temperature sensor. CONSTITUTION: A magazine inputting unit(100) supports a magazine(20) with a substrate(10) and includes a stage(110) and a first driving unit(120). A substrate transferring unit(200) transfers the substrate from the magazine to a substrate support unit(300). The substrate transferring unit includes a lower roller(210) and an upper roller(220). The substrate support unit supports the substrate transferred from the substrate transferring unit.</p> |
申请公布号 |
KR20120018835(A) |
申请公布日期 |
2012.03.06 |
申请号 |
KR20100081724 |
申请日期 |
2010.08.24 |
申请人 |
SECRON CO., LTD. |
发明人 |
CHOI, JIN JOO;CHOI, IL RAK;KIM, DU HWAN |
分类号 |
H01L21/677;B65G49/07;H01L21/56;H01L23/28 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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