发明名称 Semiconductor device and method of manufacturing the same
摘要 The semiconductor device has a stacked structure in which a tunnel oxide layer, a charge trapping layer, a blocking oxide layer, and a gate electrode are sequentially formed on a silicon substrate, wherein the blocking oxide layer includes a crystalline layer disposed adjacent to the charge trapping layer and an amorphous layer disposed adjacent to the gate electrode.
申请公布号 US8129775(B2) 申请公布日期 2012.03.06
申请号 US20090630296 申请日期 2009.12.03
申请人 AKIYAMA KOJI;HIGASHIJIMA HIROKAZU;OZAKI TETSUSHI;SHIBATA TETSUYA;TOKYO ELECTRON LIMITED 发明人 AKIYAMA KOJI;HIGASHIJIMA HIROKAZU;OZAKI TETSUSHI;SHIBATA TETSUYA
分类号 H01L29/792 主分类号 H01L29/792
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