发明名称 Method for manufacturing conductive member pattern
摘要 A method capable of easily and simply manufacturing a conductive member pattern such as a nano-size fine wiring or electrode is disclosed. Specifically, the disclosed method for manufacturing a conductive member pattern includes the steps of: forming an ion-exchangeable resin pattern on a substrate by using a photosensitive resin; making the resin pattern absorb a metal component-containing solution; and baking the resin pattern having absorbed the metal component-containing solution, wherein the width and the ratio “width/height” of the resin pattern before baking are 1 μm or less and 5 or less, respectively.
申请公布号 US8129096(B2) 申请公布日期 2012.03.06
申请号 US20090427946 申请日期 2009.04.22
申请人 NUKANOBU KOKI;AOKI NAOFUMI;CANON KABUSHIKI KAISHA 发明人 NUKANOBU KOKI;AOKI NAOFUMI
分类号 G03F7/26 主分类号 G03F7/26
代理机构 代理人
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