发明名称 Photosensitive-resin remover composition and method of fabricating semiconductor device using the same
摘要 A photosensitive-resin remover composition includes an amine compound and de-ionized water, an amount of the de-ionized water being about 45% to about 99% by weight based on a total weight of the composition.
申请公布号 US8129322(B2) 申请公布日期 2012.03.06
申请号 US201113039501 申请日期 2011.03.03
申请人 LEE AHN-HO;LIM JUNGHUN;HONG YOUNG TAEK;KIM HYUNTAK;PARK SEONGHWAN;CHOI BAIKSOON;AHN SEUNGHYUN;LEE BYUNGIL;SAMSUNG ELECTRONICS CO., LTD.;TECHNO SEMICHEM CO., LTD. 发明人 LEE AHN-HO;LIM JUNGHUN;HONG YOUNG TAEK;KIM HYUNTAK;PARK SEONGHWAN;CHOI BAIKSOON;AHN SEUNGHYUN;LEE BYUNGIL
分类号 G03F7/42 主分类号 G03F7/42
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