发明名称 Method of evaluating a film
摘要 A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.
申请公布号 US8131492(B2) 申请公布日期 2012.03.06
申请号 US20070964206 申请日期 2007.12.26
申请人 CHO SHIEN;WILDE MARKUS;FUKUTANI KATSUYUKI;RENESAS ELECTRONICS CORPORATION;THE FOUNDATION FOR THE PROMOTION OF INDUSTRIAL SCIENCE 发明人 CHO SHIEN;WILDE MARKUS;FUKUTANI KATSUYUKI
分类号 G01N37/00;G01D3/00 主分类号 G01N37/00
代理机构 代理人
主权项
地址