发明名称 Fin-type field effect transistor
摘要 Disclosed herein are improved fin-type field effect transistor (FinFET) structures and the associated methods of manufacturing the structures. In one embodiment FinFET drive current is optimized by configuring the FinFET asymmetrically to decrease fin resistance between the gate and the source region and to decrease capacitance between the gate and the drain region. In another embodiment device destruction at high voltages is prevented by ballasting the FinFET. Specifically, resistance is optimized in the fin between the gate and both the source and drain regions (e.g., by increasing fin length, by blocking source/drain implant from the fin, and by blocking silicide formation on the top surface of the fin) so that the FinFET is operable at a predetermined maximum voltage.
申请公布号 US8129773(B2) 申请公布日期 2012.03.06
申请号 US20070955579 申请日期 2007.12.13
申请人 NOWAK EDWARD J.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NOWAK EDWARD J.
分类号 H01L29/06 主分类号 H01L29/06
代理机构 代理人
主权项
地址