| 发明名称 |
Auto feedback apparatus for laser marking |
| 摘要 |
A method of manufacturing integrated circuits includes measuring a reflectivity value of a wafer. An optimum energy level for laser marking the wafer is determined using the reflectivity value. A laser beam having the optimum energy level is then emitted to make laser marks on the wafer. |
| 申请公布号 |
US8129203(B2) |
申请公布日期 |
2012.03.06 |
| 申请号 |
US20090636539 |
申请日期 |
2009.12.11 |
| 申请人 |
CHANG LAN FANG;YOU WEI-MING;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHANG LAN FANG;YOU WEI-MING |
| 分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
