| 发明名称 |
UNIT FOR SUPPORTING A SUBSTRATE AND APPARATUS FOR MOLDING A SUBSTRATE HAVING THE UNIT |
| 摘要 |
<p>PURPOSE: A substrate support unit and a substrate molding device including the same are provided to improve the molding quality of a substrate by heating the substrate through a heater embedded in the substrate support unit. CONSTITUTION: A plate(110) supports a substrate(10). A first guide rail(120) and a second guide rail are arranged on the upper side of the plate in parallel. A first stopper(130) and a second stopper(132) block the movement of the substrate. A base(140) supports the plate. A heater(150) heats the substrate supported by the plate.</p> |
| 申请公布号 |
KR20120018834(A) |
申请公布日期 |
2012.03.06 |
| 申请号 |
KR20100081722 |
申请日期 |
2010.08.24 |
| 申请人 |
SECRON CO., LTD. |
发明人 |
CHOI, JIN JOO;CHOI, IL RAK;KIM, DU HWAN |
| 分类号 |
H01L21/677;B65G49/06;H01L21/56;H01L23/28 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
