METHOD FOR FABRICATING THERMOELEMENT ARRAY MODULE USING SILICON NANOWIRES AND THERMOELEMENT ARRAY MODULE THEREOF, AND LED MODULE

摘要

PURPOSE: A thermoelectric array module using a silicon nano wire, a manufacturing method thereof, and an LED chip are provided to effectively cool heat by integrating a heat sink with an array comprised of the LED chip and a plurality of single thermoelectric devices. CONSTITUTION: A metal layer(202) is formed on a surface of an insulation substrate(204). A p/n type semiconductor layer(200) is formed on the metal layer. A module area of the p/n type semiconductor layer is patterned. A p/n type nano wire(208) is formed on the module areas. A metal layer(210) is formed on the upper side of the p/n type nano wire.