发明名称 |
METHOD FOR SETTING POSITION OF PICKER HEAD FOR SEMICONDUCTOR MANUFACTURING DEVICE |
摘要 |
PURPOSE: A method for setting the position of a picker head for a semiconductor manufacturing device is provided to mount a substrate in a chuck table accurately by picking up a semiconductor chip to be transferred in a wafer. CONSTITUTION: A base(10) is horizontally movable. A wafer table(20) is installed in a base. An ejector(30) is formed in the wafer table to be movable up and down. A first lighting unit(40) is installed in one side of the wafer table. A chuck table(50) is installed on the support(55) of the main body.
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申请公布号 |
KR20120018503(A) |
申请公布日期 |
2012.03.05 |
申请号 |
KR20100081376 |
申请日期 |
2010.08.23 |
申请人 |
HANMISEMICONDUCTOR CO., LTD. |
发明人 |
HWANG, KYU SEOK;OH, YONG SEUK |
分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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