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发明名称
DISPOSITIF MICROELECTROMECANIQUE PIEZOELECTRIQUE
摘要
申请公布号
FR2944274(B1)
申请公布日期
2012.03.02
申请号
FR20090001794
申请日期
2009.04.10
申请人
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS
发明人
FAUCHER MARC;THERON DIDIER;GAQUIERE CHRISTOPHE
分类号
B81B3/00;G01L9/00;H01L41/083
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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