ALUMINUM NITRIDE-BASED PARTICLE, METHOD FOR PRODUCING THE SAME, AND APPARATUS FOR PRODUCING ALUMINUM NITRIDE-BASED PARTICLE

摘要

PROBLEM TO BE SOLVED: To easily provide AlN particles of new constitution, which have excellent thermal conductivity.

SOLUTION: Aluminum nitride-based particles each comprise a core formed of at least one of alumina and aluminum oxynitride and a surface layer formed of aluminum nitride, which is formed on the surface of the core. The aluminum nitride-based particles are produced by mixing carbon particles and alumina particles, then arranging the resulting mixture in a crucible, and irradiating the carbon particles and alumina particles with microwave in a nitrogen atmosphere.

COPYRIGHT: (C)2012,JPO&INPIT