PROBE CARD, PROVER, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of implementing a position adjustment and a property test with high sensitivity and detecting defects while separating a position adjustment defect and a property defect in the case where any defect occurs.

SOLUTION: A probe card 1 comprises, in portions corresponding to corners of a semiconductor device 2; a property measuring probe needle 1A for electrical conduction in contact with an electrode 2A for a property measuring probe needle of the semiconductor device 2; and a position adjusting probe needle 1B of which the height from the semiconductor device 2 to a needle tip under the contact of the property measuring probe 1A with the electrode 2A for the property measuring probe needle of the semiconductor device 2 is higher than the property measuring probe needle 1A.

COPYRIGHT: (C)2012,JPO&INPIT