| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscope capable of improving processing throughput of an object. <P>SOLUTION: A microscope of the present invention includes: an image pickup part 1 that takes an image of a first object 10 that is projected to an image pickup device 50 by a projection optical system 40; a measurement part 2 that measures a second object 15 for setting an image pickup condition used for taking an image of the second image 15 by the image pickup part 1; and a control part 100 that controls the image pickup of the image pickup part 1 as well as the measurement of the measurement part 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
