发明名称 METHOD AND DEVICE FOR FORMING ORGANIC THIN FILM, AND METHOD FOR MANUFACTURING OF ORGANIC DEVICE
摘要 Provided is a method for forming an organic thin film that is capable of easily and rapidly forming a single-crystalline organic thin film while controlling the size and thickness of same. After supplying an organic solution to a surface of a substrate for manufacturing (a wide solution-accumulating region and a narrow solution-constrained region linked thereto) which is supported by a support body with a controllable temperature, a moving body with a temperature that is controllable independently of the support body is moved along the surface of the support body while being kept in contact with the organic solution. The temperature of the support body is set to a temperature positioned between a solubility curve and a supersolubility curve relating to the organic solution, and the temperature of the moving body is set to a temperature positioned higher than the solubility curve.
申请公布号 WO2012026333(A1) 申请公布日期 2012.03.01
申请号 WO2011JP68277 申请日期 2011.08.10
申请人 SONY CORPORATION;GOTO OSAMU;HOBARA DAISUKE;NOMOTO AKIHIRO;MURAKAMI YOSUKE;TOMIYA SHIGETAKA;KOBAYASHI NORIHITO;SHIMIZU KEISUKE;KATSUHARA MAO;OHE TAKAHIRO;KAWASHIMA NORIYUKI;TAKAHASHI YUKA;FUKUDA TOSHIO;ISHII YUI 发明人 GOTO OSAMU;HOBARA DAISUKE;NOMOTO AKIHIRO;MURAKAMI YOSUKE;TOMIYA SHIGETAKA;KOBAYASHI NORIHITO;SHIMIZU KEISUKE;KATSUHARA MAO;OHE TAKAHIRO;KAWASHIMA NORIYUKI;TAKAHASHI YUKA;FUKUDA TOSHIO;ISHII YUI
分类号 H01L21/368;H01L21/336;H01L29/786;H01L51/05;H01L51/40 主分类号 H01L21/368
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