| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an energization heating wire having high durability and low electrical resistance, a film forming apparatus using the energization heating wire, and a method for producing the energization heating wire. <P>SOLUTION: The energization heating wire 6 has a core part 6a and a peripheral edge part 6b. The core part 6a is linear and is made of tantalum. The peripheral edge part 6b is made of tantalum carbide and covers the core part 6a. The energization heating wire 6 has high thermal and mechanical endurance because in the energization heating wire 6, the core part 6a made of metallic tantalum is covered with the peripheral edge part 6b made of tantalum carbide having high creep strength and high mechanical strength at high temperatures. Further, the energization heating wire 6 has high conductivity and can be heated with an applied voltage comparable to an energization heating wire made only of metallic tantalum because a large portion of the cross-sectional structure of the energization heating wire 6 is the core part 6a made of metallic tantalum. <P>COPYRIGHT: (C)2012,JPO&INPIT |
