发明名称 METHOD OF FABRICATING THIN-FILM TRANSISTOR SUBSTRATE
摘要 A method of fabricating a thin-film transistor (TFT) substrate includes forming a gate electrode on a substrate; forming an insulating film on the gate electrode; forming an amorphous semiconductor pattern on the insulating film; and forming a source electrode separated from a drain electrode on the amorphous semiconductor pattern; forming a light-concentrating layer, which includes a protrusion, on the amorphous semiconductor pattern, the source electrode, and the drain electrode; and crystallizing at least part of the amorphous semiconductor pattern by irradiating light to the protrusion of the light-concentrating layer.
申请公布号 US2012052638(A1) 申请公布日期 2012.03.01
申请号 US201113191833 申请日期 2011.07.27
申请人 KIM HYUNG-JUN;JEONG CHANG-OH;YOON IL-YONG;SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM HYUNG-JUN;JEONG CHANG-OH;YOON IL-YONG
分类号 H01L21/336 主分类号 H01L21/336
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