发明名称 EDDY CURRENT THICKNESS MEASUREMENT APPARATUS
摘要 <p>A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top the melt.</p>
申请公布号 WO2012027031(A1) 申请公布日期 2012.03.01
申请号 WO2011US44343 申请日期 2011.07.18
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC;ROSEN, GARY, J.;SINCLAIR, FRANK;SOSKOV, ALEXANDER;BUFF, JAMES, S. 发明人 ROSEN, GARY, J.;SINCLAIR, FRANK;SOSKOV, ALEXANDER;BUFF, JAMES, S.
分类号 C30B11/00;C30B15/00;C30B15/20;C30B29/06;C30B35/00 主分类号 C30B11/00
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