| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection method utilizing an illumination transition region capable of visualizing a defect at high sensitivity and utilizing the illumination transition region for the whole surface of a lens. <P>SOLUTION: A lens to be inspected is transparently illuminated by pattern illumination composed of a bright part and a dark part. An imaging means is arranged on the opposite side of an illumination about the lens to be inspected, and the lens to be inspected is focused. A projected pattern shape is symmetrical about a lens power center axis or a power center face and is composed of at least one bright part and one dark part. A plurality of different patterns are projected to the lens to be inspected while maintaining symmetry about the center axis or the center face to form an illumination transition region on the whole surface of the lens, and images are acquired for each of the plurality of projected patterns. <P>COPYRIGHT: (C)2012,JPO&INPIT |
