| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve measurement precision of a three-dimensional shape of a measurement object by reducing noise generated in a signal of the measurement object. <P>SOLUTION: A plurality of patterns 217-220 which bisect a space are projected on a measurement object one after another, and current image data on the measurement object is obtained. Then a plurality of patterns 220-223 having been encoded based upon a Hadamard matrix are projected on the measurement object one after another, and current image data on the measurement object is obtained. Then an inverse matrix of the Hadamard matrix is used to convert the image data obtained by projecting the patterns 220-223 having been encoded based upon the Hadamard matrix into image data obtained by projecting a plurality patterns obtained by a shifting slit positions of a pattern comprising a plurality of slit lights. The three-dimensional shape of the measurement object is obtained through triangulation based upon the converted image data and the image data obtained by projecting patterns 217-220 which bisect the space. <P>COPYRIGHT: (C)2012,JPO&INPIT |
