| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology for forming a carbonaceous coating having wear resistance and corrosion resistance, and to provide a corrosion-resistant sliding member excellent in slide property and corrosion resistance. <P>SOLUTION: The corrosion-resistant sliding member is produced by decreasing a silicon additive amount from the surface of the sliding member toward the surface of the carbonaceous coating and at the same time by forming a functionally gradient membrane having a fluorine additive amount increased from the surface of the sliding member toward the surface of the carbonaceous coating, or/and by laminating a first carbonaceous coating film layer with silicon in an additive amount of 10 atom% to 30 atom% and fluorine in an additive amount of 10 atom% or lower and a second carbonaceous coating film layer with silicon in an additive amount of 5 atom% to 20 atom% and fluorine in an additive amount of 10 atom% to 30 atom%. <P>COPYRIGHT: (C)2012,JPO&INPIT |
