发明名称 |
METHODS OF USING A SILICON NANOPARTICLE FLUID TO CONTROL IN SITU A SET OF DOPANT DIFFUSION PROFILES |
摘要 |
Disclosed are methods of forming multi-doped junctions, which utilize a nanoparticle ink to form an ink pattern on a surface of a substrate. From the ink pattern, a densified film ink pattern can be formed. The disclosed methods may allow in situ controlling of dopant diffusion profiles.
|
申请公布号 |
US2012052665(A1) |
申请公布日期 |
2012.03.01 |
申请号 |
US201113238252 |
申请日期 |
2011.09.21 |
申请人 |
SCARDERA GIUSEPPE;POPLAVSKYY DMITRY;BURROWS MICHAEL;SHAH SUNIL;INNOVALIGHT, INC. |
发明人 |
SCARDERA GIUSEPPE;POPLAVSKYY DMITRY;BURROWS MICHAEL;SHAH SUNIL |
分类号 |
H01L21/22 |
主分类号 |
H01L21/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|