SPATIAL LIGHT MODULATOR AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a compact spatial light modulator manufactured at less man-hour; and to provide an exposure device equipped with the spatial light modulator.

SOLUTION: An electric circuit board 336 is disposed facing a lower main surface (the other main surface) of an electrode substrate 332 disposed with a plurality of first electrodes 333 and is formed with a plurality of wires 337 at ends of wiring regions Ra of the plurality of first electrodes 333 corresponding one-to-one therewith on the electric circuit board 336 so as to be electrically connected to the plurality of first electrodes 333 by inductive coupling. A voltage applied from a modulation unit to the first electrodes 333 via the respective wires 337 is controlled to control an electric field generated between the plurality of first electrodes 333 and a second electrode 335.

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