摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for efficiently producing silicon microparticles having a uniform particle size. <P>SOLUTION: The method includes: a burning step for burning a mixture including a silicon source and a carbon source in an inert atmosphere; a rapid cooling step for rapidly cooling gas generated by burning the mixture, and for obtaining a composite powder including the silicon microparticles and silicon oxide; a heating step for heating the composite powder in an oxidative atmosphere; and a removal step for removing silicon monoxide and silicon dioxide from the heated composite powder. <P>COPYRIGHT: (C)2012,JPO&INPIT |