| 发明名称 |
SPM Probe and Inspection Device for Light Emission Unit |
| 摘要 |
An SPM probe includes: an SPM cantilever; a thermal resistance formed at a probe portion of the SPM cantilever; an insulating film formed on the thermal resistance; and one wire for converting the micro-scale energy source into heat or propagating light, formed on the insulating film.
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| 申请公布号 |
US2012054924(A1) |
申请公布日期 |
2012.03.01 |
| 申请号 |
US201113192910 |
申请日期 |
2011.07.28 |
| 申请人 |
ZHANG KAIFENG;HIROSE TAKENORI;NAKAGOMI TSUNEO;WATANABE MASAHIRO;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
ZHANG KAIFENG;HIROSE TAKENORI;NAKAGOMI TSUNEO;WATANABE MASAHIRO |
| 分类号 |
G01Q20/02;G01Q70/08 |
主分类号 |
G01Q20/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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